IPA Dryer

IPA Dryer

Wafer Process Systems, Inc. Liquid Diffusion Technology (LDT) provides enhanced drying performance for a variety of substrates and material surfaces. This proprietary drying process and its subsystems control the creation of an ultra-pure IPA aerosol layer that moves across a motionless substrate to diffusively remove water, without leaving watermarks. The Venturi Aerosol Generator and its subsystem efficiently creates the ultra-pure IPA aerosol layer with the robust process flexibility necessary to dry high aspect ratio / deep trench topography, half-pitch wafer spacing, and a wide variety of other applications. This subsystem uses no energy to passively create a unique range of IPA aerosols that other IPA dryers simply cannot create. Furthermore, using an IPA aerosol in itself eliminates the safety hazard of IPA vapor dryers. Wafer Process Systems, Inc. Passive Aerosol Dryers provide an efficient and clean drying system that is safe and environmentally-friendly.