Wafer Process Systems, Inc.

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3641 Charter Park Dr.

San Jose, CA 95136

About Wafer Process Systems, Inc.

Wafer Process Systems Inc. manufactures a complete line of wet benches including Manual, Semi Automated and Fully Automated Dry In / Dry Out Wet Chemical Process Equipment used in the manufacturing silicon and compound materials used in the manufacturing of microelectronic devices, computer disc drive media and slider assemblies, flat panel displays and photovoltaic products. Process applications include Surface Pre Cleans for Oxides and Metals Deposition (SC1 and SC2), Oxide Resist Strip (H2SO4/H202), Metal Resist Strip (Organic Solvent Chemistries), Metal Etch (Au, Cu, CR, Al), Nitride Strip, Buffered Oxide Etch, Electroless Chemical Deposition and Electrochemical Deposition and Conveyorized Spray Etch systems. All Equipment designs are compatible for use in a Class 10 Clean Room Environment.

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Products by Wafer Process Systems, Inc.

Automated Wet Bench
Wafer Process Systems Inc. Model WPS-FA-RA-300 / 450, Fully-Automated 300MM / 450MM Front and Rear Access Batch Chemical Process System with 300MM and 450MM process capability which incorporates Y/Z Linear Servo Positioning Systems to provide a wide range of movement controls to accommodate... Read more
IPA Dryer
Wafer Process Systems, Inc. Liquid Diffusion Technology (LDT) provides enhanced drying performance for a variety of substrates and material surfaces. This proprietary drying process and its subsystems control the creation of an ultra-pure IPA aerosol layer that moves across a motionless... Read more
Conveyorized Wet Bench
Wafer Process Systems Inc. manufactures Conveyorized Web Etch Systems use in the manufacturing of RFID Soft Tags used for Source Tagging Inventory Control and Loss and Theft Prevention. The Aluminum / Polyethylene / Aluminum Web is Etched using our state of the art Vertical Spray Etch Technology... Read more