Wafer Process Systems, Inc.

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Wafer Process Systems Inc. manufactures a complete line of wet benches including Manual, Semi Automated and Fully Automated Dry In / Dry Out Wet Chemical Process Equipment used in the manufacturing silicon and compound materials used in the manufacturing of microelectronic devices, computer disc drive media and slider assemblies, flat panel displays and photovoltaic products. Process applications include Surface Pre Cleans for Oxides and Metals Deposition (SC1 and SC2), Oxide Resist Strip (H2SO4/H202), Metal Resist Strip (Organic Solvent Chemistries), Metal Etch (Au, Cu, CR, Al), Nitride Strip, Buffered Oxide Etch, Electroless Chemical Deposition and Electrochemical Deposition and Conveyorized Spray Etch systems. All Equipment designs are compatible for use in a Class 10 Clean Room Environment.

Company Details

Address
3641 Charter Park Dr.
San Jose, CA 95136

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Products & Services

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Automated Wet Bench

Wafer Process Systems Inc. Model WPS-FA-RA-300 / 450, Fully-Automated 300MM / 450MM Front and Rear Access Batch...

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IPA Dryer

Wafer Process Systems, Inc. Liquid Diffusion Technology (LDT) provides enhanced drying performance for a variety of...

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Conveyorized Wet Bench

Wafer Process Systems Inc. manufactures Conveyorized Web Etch Systems use in the manufacturing of RFID Soft Tags used...

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Manual Wet Bench-Solvent

The Wafer Process Systems Inc. Model WPS-800-VLF-FM-SS, Factory Mutual Approved Stainless Steel Solvent Wet Process...

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Chemical Dispense

Wafer Process Systems Inc. manufactures world class wet process equipment using precision fluid controls and components...

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